Intellectual Merit: The combination of two or more materials in the form of nanocomposite in making microstructures could open up a new class of materials for microsystem applications. The first motivation of this research is therefore to investigate metal-organic/inorganic nanocomposites by adding nanoparticles into microstructures in order to modify and strengthen the material properties and alleviate the mechanical deficiency such as fatigue and aging with the advantage of low temperature processing and feasibility for direct integration with microelectronics.