Focus Center in Materials, Structures, and Devices

I. Sub-10 nm Silicon-Based FETs
A. Double-Gate FETs
(1) Develop self-aligned double-gate FinFETs with special attention to process simplification. Fabricate prototype devices to verify the device concept and investigate the characteristics of small double-gate CMOS devices. Demonstrate performance superior to bulk devices. Explore the impact on circuits through mixed-mode and SPICE
simulations.
B. Performance Enhanced FETs via New Materials and Fabrication Technologies
(1) Explore low-barrier silicides for application to Schottky source/drain CMOS devices. Break the trade-off between Idsat and Ioff of Schottky soure/drain devices through the use of ultra-thin body device structures, either single gate or double gate
(2) Investigate the formation of single-crystalline semiconductor films by solid-phase epitaxy for use as channel (body) in ultra-thin-body transistors (either single-gate or double gate). Optimize crystalline quality and film thickness control. Develop novel scalable MOSFET structures using SPE films.
II. Molecular and Organic Semiconductor Electronics
A. Molecular Devices and Interface Electronics
B. Organic Semiconductor FETs
(1) Explore and optimize chemical synthesis and fabrication processes for high-performance organic TFTs using highly ordered thin films created using self-assembly phenomena. Evaluate scalability of these devices to sub-micron dimensions and usability of these devices in 3D integrated circuits.
(2) Study organic-inorganic interface properties in organic TFTs, and engineer these interfaces to develop high-performance organic TFTs with low parasitic resistance and improved operating currents and voltages.
III. Nanotube Electronics
A. NEMS (Nano-electromechanical Systems)
(1) Explore electrostatically actuated mechanical switches using carbon nanotubes at the switch contacts. Evaluate performance limits of such devices including speed and reliability. Investigate suitable circuit architectures and develop realistic circuit models to estimate performance.